Photopolymerization Inhibition Dynamics for Sub-Diffraction Direct Laser Writing Lithography
نویسندگان
چکیده
منابع مشابه
Photopolymerization Inhibition Dynamics for Sub-Diffraction Direct Laser Writing Lithography
Selective inhibition of the polymerization leads to sub-diffraction feature sizes in direct writing lithography-a principle based on the idea of stimulated emission depletion (STED) microscopy. However, the detailed understanding of the inhibition process is a key point to further enhance the resolution of the system. The authors present experiments focused on the time dynamics of the inhibitio...
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ژورنال
عنوان ژورنال: ChemPhysChem
سال: 2012
ISSN: 1439-4235
DOI: 10.1002/cphc.201200006